• Patent Title: Variable resistance memory device and manufacturing method of the same
  • Application No.: US17211764
    Application Date: 2021-03-24
  • Publication No.: US11563172B2
    Publication Date: 2023-01-24
  • Inventor: Jae Hyun Han
  • Applicant: SK hynix Inc.
  • Applicant Address: KR Icheon-si
  • Assignee: SK hynix Inc.
  • Current Assignee: SK hynix Inc.
  • Current Assignee Address: KR Icheon-si
  • Priority: KR10-2020-0124963 20200925
  • Main IPC: H01L45/00
  • IPC: H01L45/00 H01L27/24
Variable resistance memory device and manufacturing method of the same
Abstract:
There are provided a variable resistance memory device and a manufacturing method of the same. The variable resistance memory device includes: a first electrode; a second electrode arranged in a vertical direction from the first electrode; and an oxide layer having an oxygen deficient region extending in the vertical direction between the second electrode and the first electrode.
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