Invention Grant
- Patent Title: Plasma processing apparatus
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Application No.: US16720154Application Date: 2019-12-19
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Publication No.: US11569070B2Publication Date: 2023-01-31
- Inventor: Kazunari Sekiya , Masaharu Tanabe , Tadashi Inoue , Hiroshi Sasamoto , Tatsunori Sato , Nobuaki Tsuchiya
- Applicant: Canon Anelva Corporation
- Applicant Address: JP Kawasaki
- Assignee: Canon Anelva Corporation
- Current Assignee: Canon Anelva Corporation
- Current Assignee Address: JP Kawasaki
- Agency: Buchanan Ingersoll & Rooney PC
- Priority: WOPCT/JP2017/023603 20170627,WOPCT/JP2017/023611 20170627,JPJP2018-017554 20180202
- Main IPC: H01J37/32
- IPC: H01J37/32 ; H01J37/18

Abstract:
A plasma processing apparatus includes a balun having a first input terminal, a second input terminal, a first output terminal, and a second output terminal, a vacuum container, a first electrode electrically connected to the first output terminal, a second electrode electrically connected to the second output terminal, and a connection unit configured to electrically connect the vacuum container and ground, the connection unit including an inductor.
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