Invention Grant
- Patent Title: Excimer lamp
-
Application No.: US17736279Application Date: 2022-05-04
-
Publication No.: US11569083B2Publication Date: 2023-01-31
- Inventor: Shigeki Fujisawa , Kazuyuki Mori
- Applicant: Ushio Denki Kabushiki Kaisha
- Applicant Address: JP Tokyo
- Assignee: Ushio Denki Kabushiki Kaisha
- Current Assignee: Ushio Denki Kabushiki Kaisha
- Current Assignee Address: JP Tokyo
- Agency: Studebaker & Brackett PC
- Priority: JP2018-129309 20180706
- Main IPC: H01J65/00
- IPC: H01J65/00 ; H01J61/12 ; H01J61/30 ; H01J61/33 ; H01J61/36

Abstract:
In the excimer lamp according to the present invention, a flat discharge vessel having a substantially rectangular cross-sectional shape and comprising a pair of planar parts and a pair of side-surface parts has a pair of external electrodes disposed on the respective outer surfaces of the planar parts. The end parts of the external electrodes are provided with an auxiliary electrode extending to a region that is made smaller than the distance between the planar parts. A lead that supplies electricity to the external electrode is connected to the auxiliary electrode in the region that is made smaller than the distance between the planar parts.
Public/Granted literature
- US20220262617A1 EXCIMER LAMP Public/Granted day:2022-08-18
Information query