Invention Grant
- Patent Title: Semiconductor manufacturing apparatus and manufacturing method for semiconductor device
-
Application No.: US16813126Application Date: 2020-03-09
-
Publication No.: US11569118B2Publication Date: 2023-01-31
- Inventor: Tsuyoshi Yokomori , Tatsuyuki Okubo , Yuki Nakui , Hiroshi Maki , Akira Saito , Naoki Okamoto
- Applicant: Fasford Technology Co., Ltd.
- Applicant Address: JP Minami-Alps
- Assignee: Fasford Technology Co., Ltd.
- Current Assignee: Fasford Technology Co., Ltd.
- Current Assignee Address: JP Minami-Alps
- Agency: Crowell. & Moring LLP
- Priority: JPJP2019-056583 20190325
- Main IPC: H01L21/683
- IPC: H01L21/683

Abstract:
A semiconductor manufacturing apparatus includes a thrust-up unit having a plurality of blocks in contact with a dicing tape, a head having a collet absorbing the die and capable of being moved up and down, and a control section controlling the operation of the thrust-up unit and the head. The thrust-up unit can operate each of the plurality of blocks independently. The control section configures the thrust-up sequences of the plurality of blocks in a plurality of steps, and controls the operation of the plurality of blocks on the basis of a time chart recipe capable of setting the height and the speed of the plurality of blocks for each block and in each step.
Public/Granted literature
- US20200312699A1 Semiconductor Manufacturing Apparatus and Manufacturing Method for Semiconductor Device Public/Granted day:2020-10-01
Information query
IPC分类: