Invention Grant
- Patent Title: Semiconductor structure and manufacturing method thereof
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Application No.: US17659062Application Date: 2022-04-13
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Publication No.: US11569240B2Publication Date: 2023-01-31
- Inventor: Qinghua Han
- Applicant: CHANGXIN MEMORY TECHNOLOGIES, INC.
- Applicant Address: CN Hefei
- Assignee: CHANGXIN MEMORY TECHNOLOGIES, INC.
- Current Assignee: CHANGXIN MEMORY TECHNOLOGIES, INC.
- Current Assignee Address: CN Hefei
- Agency: Cooper Legal Group, LLC
- Priority: CN202110746053.8 20210701
- Main IPC: H01L27/108
- IPC: H01L27/108 ; H01L29/423 ; H01L29/66 ; H01L29/786

Abstract:
The present disclosure provides a semiconductor structure and a manufacturing method thereof. The manufacturing method includes: providing a base; forming bit lines on the base, and forming semiconductor channels on surfaces of the bit lines away from the base, the semiconductor channel including a first doped region, a channel region and a second doped region arranged sequentially; forming a first dielectric layer, the first dielectric layer surrounding sidewalls of the semiconductor channels, and a first gap being provided between parts of the first dielectric layer located on sidewalls of adjacent semiconductor channels on a same bit line; forming a second dielectric layer, the second dielectric layer filling up the first gaps, and a material of the second dielectric layer being different from a material of the first dielectric layer; removing a part of the first dielectric layer to expose sidewalls of the channel regions.
Public/Granted literature
- US20230005923A1 SEMICONDUCTOR STRUCTURE AND MANUFACTURING METHOD THEREOF Public/Granted day:2023-01-05
Information query
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