Invention Grant
- Patent Title: Ferroelectric memory device using back-end-of-line (BEOL) thin film access transistors and methods for forming the same
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Application No.: US17230598Application Date: 2021-04-14
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Publication No.: US11569250B2Publication Date: 2023-01-31
- Inventor: Bo-Feng Young , Mauricio Manfrini , Sai-Hooi Yeong , Han-Jong Chia , Yu-Ming Lin
- Applicant: Taiwan Semiconductor Manufacturing Company Limited
- Applicant Address: TW Hsinchu
- Assignee: Taiwan Semiconductor Manufacturing Company Limited
- Current Assignee: Taiwan Semiconductor Manufacturing Company Limited
- Current Assignee Address: TW Hsinchu
- Agency: The Marbury Law Group, PLLC
- Main IPC: H01L27/11
- IPC: H01L27/11 ; G11C11/22 ; H01L27/11507 ; H01L29/786 ; H01L21/02 ; H01L29/66

Abstract:
A memory device includes metal interconnect structures embedded within dielectric material layers that overlie a top surface of a substrate, a thin film transistor embedded in a first dielectric material layer selected from the dielectric material layers, and is vertically spaced from the top surface of the substrate, and a ferroelectric memory cell embedded within the dielectric material layers. A first node of the ferroelectric memory cell is electrically connected to a node of the thin film transistor through a subset of the metal interconnect structures that is located above, and vertically spaced from, the top surface of the substrate.
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