Invention Grant
- Patent Title: Solid-state imaging device having a waveguide partition grid with variable grid widths
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Application No.: US16872605Application Date: 2020-05-12
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Publication No.: US11569285B2Publication Date: 2023-01-31
- Inventor: Chi-Han Lin
- Applicant: VisEra Technologies Company Limited
- Applicant Address: TW Hsin-Chu
- Assignee: VisEra Technologies Company Limited
- Current Assignee: VisEra Technologies Company Limited
- Current Assignee Address: TW Hsin-Chu
- Agency: Muncy, Geissler, Olds & Lowe, P.C.
- Main IPC: H01L27/146
- IPC: H01L27/146 ; G02B5/20 ; G02B7/28 ; G02B1/11

Abstract:
A solid-state imaging device having a first area and a second area surrounding the first area is provided. The solid-state imaging device includes a substrate having a plurality of photoelectric conversion elements. The solid-state imaging device also includes a color filter layer disposed on the substrate. The color filter layer includes a plurality of color filter segments corresponding to the plurality of photoelectric conversion elements. The solid-state imaging device further includes an optical waveguide layer over the color filter layer. The optical waveguide layer includes a waveguide partition grid, a waveguide material in spaces of the waveguide partition grid, and an anti-reflection film on the waveguide partition grid and the waveguide material. The width of the top of the waveguide partition grid is larger than the width of the bottom of the waveguide partition grid.
Public/Granted literature
- US20210358985A1 SOLID-STATE IMAGING DEVICE Public/Granted day:2021-11-18
Information query
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