Invention Grant
- Patent Title: Image sensor and method forming the same
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Application No.: US17090298Application Date: 2020-11-05
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Publication No.: US11569291B2Publication Date: 2023-01-31
- Inventor: Kuei-An Lin , Chi-Han Lin
- Applicant: VisEra Technologies Company Limited
- Applicant Address: TW Hsin-Chu
- Assignee: VisEra Technologies Company Limited
- Current Assignee: VisEra Technologies Company Limited
- Current Assignee Address: TW Hsin-Chu
- Agency: Muncy, Geissler, Olds & Lowe, P.C.
- Main IPC: H01L27/146
- IPC: H01L27/146

Abstract:
A method forming an image sensor includes: providing a substrate including a plurality of sensing portions; forming a color filter layer on the substrate; forming a micro-lens material layer on the color filter layer; and forming a hard mask pattern on the micro-lens material layer, wherein the hard mask pattern has a first gap and a second gap larger than the first gap. The method includes reflowing the hard mask pattern into a plurality of dome shapes; transferring the plurality of dome shapes into the micro-lens material layer to form a plurality of micro-lenses; and forming a top film conformally on the plurality of micro-lenses.
Public/Granted literature
- US20220139996A1 IMAGE SENSOR AND METHOD FORMING THE SAME Public/Granted day:2022-05-05
Information query
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