Invention Grant
- Patent Title: Metal-insulator-metal capacitors
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Application No.: US17142489Application Date: 2021-01-06
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Publication No.: US11569343B2Publication Date: 2023-01-31
- Inventor: Kyung Wook Kwon , Mun Young Lee , Myoung Kyun Choi
- Applicant: SK Hynix system ic Inc.
- Applicant Address: KR Chungcheongbuk-do
- Assignee: SK Hynix system ic Inc.
- Current Assignee: SK Hynix system ic Inc.
- Current Assignee Address: KR Chungcheongbuk-do
- Agency: IP & T Group LLP
- Priority: KR10-2020-0069918 20200609
- Main IPC: H01L23/522
- IPC: H01L23/522 ; H01L27/08 ; H01L49/02

Abstract:
A metal-insulator-metal (MIM) capacitor includes a first group of metal contacts disposed on a first region of an isolation layer spaced apart from each other in a first direction, a second group of metal contacts disposed on a second region of the isolation layer spaced apart from each other in the first direction, a dielectric layer disposed between the first group of metal contacts and the second group of metal contacts, a first metal electrode disposed to contact the top surfaces of the first group of metal contacts, and a second metal electrode disposed to contact the top surfaces of the second group of metal contacts.
Public/Granted literature
- US20210384293A1 METAL-INSULATOR-METAL CAPACITORS Public/Granted day:2021-12-09
Information query
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