- Patent Title: Semiconductor device and semiconductor device manufacturing method
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Application No.: US17209200Application Date: 2021-03-22
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Publication No.: US11569379B2Publication Date: 2023-01-31
- Inventor: Masahiro Hatakenaka
- Applicant: ABLIC Inc.
- Applicant Address: JP Tokyo
- Assignee: ABLIC Inc.
- Current Assignee: ABLIC Inc.
- Current Assignee Address: JP Tokyo
- Agency: JCIPRNET
- Priority: JPJP2020-061816 20200331
- Main IPC: H01L29/78
- IPC: H01L29/78 ; H01L29/66 ; H01L21/265 ; H01L21/225

Abstract:
In the semiconductor device, a high-concentration diffusion layer and a low-concentration diffusion layer are disposed around a drain diffusion layer of an ESD protection element. The high-concentration diffusion layer is separated from a gate electrode, and a medium concentration LDD diffusion layer is disposed in a separation gap. Variations in characteristics are suppressed by reducing thermal treatment on the high-concentration diffusion layer and a medium concentration diffusion layer.
Public/Granted literature
- US20210305425A1 SEMICONDUCTOR DEVICE AND SEMICONDUCTOR DEVICE MANUFACTURING METHOD Public/Granted day:2021-09-30
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