Invention Grant
- Patent Title: Method for producing piezoelectric actuator and method for producing liquid transport apparatus
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Application No.: US15454074Application Date: 2017-03-09
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Publication No.: US11571897B2Publication Date: 2023-02-07
- Inventor: Hiroto Sugahara
- Applicant: Brother Kogyo Kabushiki Kaisha
- Applicant Address: JP Nagoya
- Assignee: Brother Kogyo Kabushiki Kaisha
- Current Assignee: Brother Kogyo Kabushiki Kaisha
- Current Assignee Address: JP Nagoya
- Agency: Baker Botts L.L.P.
- Priority: JPJP2008-020567 20080131
- Main IPC: B41J2/16
- IPC: B41J2/16 ; B41J2/14 ; C23C24/04 ; H01L41/09 ; H01L41/314 ; B41J27/00 ; C23C16/448 ; H01B1/08 ; H01H57/00

Abstract:
A method for producing a liquid transport apparatus is disclosed. The liquid transport apparatus includes a pressure chamber plate, a ceramics layer formed on a surface of the pressure chamber plate, a piezoelectric layer formed on the ceramics layer, and an electrode formed on the piezoelectric layer. The ceramics layer is formed by heating an insulating ceramic material at a temperature lower than an annealing temperature of the piezoelectric layer. Accordingly, the atoms of the pressure chamber plate are suppressed from being diffused into the piezoelectric layer.
Public/Granted literature
- US20170232744A1 METHOD FOR PRODUCING PIEZOELECTRIC ACTUATOR AND METHOD FOR PRODUCING LIQUID TRANSPORT APPARATUS Public/Granted day:2017-08-17
Information query
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