- Patent Title: Compound, polyimide resin and method of producing the same, photosensitive resin composition, patterning method and method of forming cured film, interlayer insulating film, surface protective film, and electronic component
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Application No.: US16848439Application Date: 2020-04-14
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Publication No.: US11572442B2Publication Date: 2023-02-07
- Inventor: Dmitry Zubarev , Hiroyuki Urano , Katsuya Takemura , Masashi Iio , Kazuya Honda , Yoshio Kawai
- Applicant: International Business Machines Corporation , Shin-Etsu Chemical Co., Ltd.
- Applicant Address: US NY Armonk; JP Tokyo
- Assignee: International Business Machines Corporation,Shin-Etsu Chemical Co., Ltd.
- Current Assignee: International Business Machines Corporation,Shin-Etsu Chemical Co., Ltd.
- Current Assignee Address: US NY Armonk; JP Tokyo
- Agency: CanaanLaw, P.C.
- Agent Karen Canaan
- Main IPC: C08G73/14
- IPC: C08G73/14 ; G03F7/023 ; G03F7/038 ; G03F7/38 ; G03F7/40 ; C07C63/49 ; C07C211/49 ; C07C233/65 ; G03F7/022 ; G03F7/039 ; G03F7/16 ; G03F7/20 ; G03F7/32

Abstract:
Provided is a compound that can be used as a base resin for a photosensitive resin composition. The photosensitive resin can form a fine pattern and can achieve high resolution without impairing mechanical strength and solubility. The compound is represented by the general formula (1): wherein Z represents a linear, branched or cyclic divalent hydrocarbon group having 2 to 30 carbon atoms; X1 to X3 represent any of —CO2—, —CONRX1—, —O—, —NRX1—, —S—, —SO2—, —SO3— and —SO2NRX1— and may be the same as or different from each other, provided that RX1 is a hydrogen atom or a monovalent hydrocarbon group having 1 to 30 carbon atoms; Ar represents a divalent aromatic group having 2 to 30 carbon atoms; L1 and L2 independently represent a divalent hydrocarbon group having 1 to 30 carbon atoms; and x and y are each independently 0 or 1.
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