Invention Grant
- Patent Title: Method for adjusting a beam path for tracking an object
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Application No.: US17005264Application Date: 2020-08-27
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Publication No.: US11573076B2Publication Date: 2023-02-07
- Inventor: Florian Rettich , Wolfgang Högele , Volker Rasenberger , Thomas Mayer
- Applicant: Carl Zeiss Industrielle Messtechnik GmbH
- Applicant Address: DE Oberkochen
- Assignee: Carl Zeiss Industrielle Messtechnik GmbH
- Current Assignee: Carl Zeiss Industrielle Messtechnik GmbH
- Current Assignee Address: DE Oberkochen
- Agency: Ewers IP Law PLLC
- Agent Falk Ewers
- Priority: DE102019212856.4 20190827
- Main IPC: G01B9/02
- IPC: G01B9/02 ; G01B11/14

Abstract:
An apparatus for adjusting a beam path for tracking an object includes an illumination unit to generate an illumination light beam, an optical unit with a beam expander optical unit and a beam deflection unit, the beam expander optical unit being configured to divergently expand the illumination light beam and the beam deflection unit being configured to deflect the illumination light beam spatially about two different axes of rotation, a detector unit to capture a light beam reflected by the object in response to an illumination by the illumination light beam and to generate a measurement signal, an evaluation and control unit to evaluate the measurement signal and configured to determine a manipulated variable for setting an effective focal length of the beam expander optical unit and/or for setting a spatial alignment of the beam deflection unit based on the information item in respect of the illumination of the object.
Public/Granted literature
- US20210063138A1 METHOD FOR ADJUSTING A BEAM Public/Granted day:2021-03-04
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