Invention Grant
- Patent Title: Sensor element
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Application No.: US16634616Application Date: 2018-07-19
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Publication No.: US11573121B2Publication Date: 2023-02-07
- Inventor: Atsuomi Fukuura
- Applicant: KYOCERA Corporation
- Applicant Address: JP Kyoto
- Assignee: KYOCERA Corporation
- Current Assignee: KYOCERA Corporation
- Current Assignee Address: JP Kyoto
- Agency: Studebaker & Brackett PC
- Priority: JPJP2017-147030 20170728
- International Application: PCT/JP2018/027127 WO 20180719
- International Announcement: WO2019/021936 WO 20190131
- Main IPC: G01H11/08
- IPC: G01H11/08 ; G01L1/18 ; G01N5/02 ; G01N27/04

Abstract:
A sensor element comprises: a first substrate; a detector disposed on the first substrate; and a second substrate surrounding the first substrate and supporting the first substrate. The second substrate is thicker than the first substrate. The second substrate has a connection part which is connected to the first substrate and a non-connection part which is not connected to the first substrate. The detector is located in the vicinity of the connection part.
Public/Granted literature
- US20200232843A1 SENSOR ELEMENT Public/Granted day:2020-07-23
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