Invention Grant
- Patent Title: High sensitivity silicon piezoresistor force sensor
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Application No.: US16573500Application Date: 2019-09-17
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Publication No.: US11573136B2Publication Date: 2023-02-07
- Inventor: Brian Speldrich , Richard Alan Davis
- Applicant: Honeywell International Inc.
- Applicant Address: US NC Charlotte
- Assignee: Honeywell International Inc.
- Current Assignee: Honeywell International Inc.
- Current Assignee Address: US NC Charlotte
- Agency: Alston & Bird LLP
- Main IPC: G01L1/18
- IPC: G01L1/18 ; G01L1/22
Abstract:
Methods and systems for sensing a force using a sense die are provided. The sense die may include a slab die; an actuation element configured to contact the slab die and apply a force to the slab die; and one or more sense elements supported by the slab die.
Public/Granted literature
- US20200033207A1 HIGH SENSITIVITY SILICON PIEZORESISTOR FORCE SENSOR Public/Granted day:2020-01-30
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