Invention Grant
- Patent Title: Surface stress sensor, hollow structural element, and method for manufacturing same
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Application No.: US16647878Application Date: 2018-09-20
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Publication No.: US11573137B2Publication Date: 2023-02-07
- Inventor: Takanori Murakami , Hidenori Mochizuki , Daiki Hirashima , Seiichi Kato , Kazuma Komatsu
- Applicant: ASAHI KASEI KABUSHIKI KAISHA
- Applicant Address: JP Tokyo
- Assignee: ASAHI KASEI KABUSHIKI KAISHA
- Current Assignee: ASAHI KASEI KABUSHIKI KAISHA
- Current Assignee Address: JP Tokyo
- Agency: Morgan, Lewis & Bockius LLP
- Priority: JPJP2017-180132 20170920,JPJP2017-246442 20171222,JPJP2018-047234 20180314,JPJP2018-176538 20180920
- International Application: PCT/JP2018/034938 WO 20180920
- International Announcement: WO2019/059326 WO 20190328
- Main IPC: G01L1/18
- IPC: G01L1/18 ; G01M5/00

Abstract:
Provided are a surface stress sensor that enables deterioration in measurement precision to be suppressed and a method for manufacturing the same. A surface stress sensor includes: a membrane configured to be bent by applied surface stress; a frame member configured to surround the membrane with gaps interposed therebetween when viewed from the thickness direction of the membrane; at least a pair of coupling portions configured to couple the membrane and the frame member; a flexible resistor configured to be disposed on at least one of the coupling portions and have a resistance value that changes according to bending induced in the coupling portion; and a support base member configured to be connected to the frame member and overlap the frame member when viewed from the thickness direction of the membrane, in which a cavity portion is disposed between the membrane and the support base member.
Public/Granted literature
- US20200249104A1 SURFACE STRESS SENSOR, HOLLOW STRUCTURAL ELEMENT, AND METHOD FOR MANUFACTURING SAME Public/Granted day:2020-08-06
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