Invention Grant
- Patent Title: Capacitive diaphragm vacuum gauge including a pressure sensor with multiple recesses being formed in the diaphragm
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Application No.: US17178636Application Date: 2021-02-18
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Publication No.: US11573142B2Publication Date: 2023-02-07
- Inventor: Yusuke Niimura , Takuya Ishihara , Masaru Soeda , Masashi Sekine
- Applicant: AZBIL CORPORATION
- Applicant Address: JP Tokyo
- Assignee: AZBIL CORPORATION
- Current Assignee: AZBIL CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Priority: JPJP2020-026189 20200219
- Main IPC: G01L9/00
- IPC: G01L9/00
Abstract:
A pressure sensor includes a diaphragm of a thin plate shape, the diaphragm forming part of a wall surface of a pressure chamber into and out from which a measurement target fluid flows. Multiple recesses are formed in the diaphragm on a side in contact with the measurement target fluid, and an interval between adjacent two of the multiple recesses is 10 μm or less.
Public/Granted literature
- US20210255048A1 PRESSURE SENSOR Public/Granted day:2021-08-19
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