Invention Grant
- Patent Title: Inertial sensor and inertial measurement unit
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Application No.: US17389462Application Date: 2021-07-30
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Publication No.: US11573246B2Publication Date: 2023-02-07
- Inventor: Satoru Tanaka
- Applicant: Seiko Epson Corporation
- Applicant Address: JP Tokyo
- Assignee: Seiko Epson Corporation
- Current Assignee: Seiko Epson Corporation
- Current Assignee Address: JP Tokyo
- Agency: Hamess, Dickey & Pierce, P.L.C.
- Priority: JPJP2020-130103 20200731
- Main IPC: G01P15/125
- IPC: G01P15/125

Abstract:
An inertial sensor includes: a substrate; a fixing part arranged at one surface of the substrate; a moving element having an opening and configured to swing about a rotation axis along a first direction; a support beam supporting the moving element as the rotation axis in the opening of the moving element; and a support part supporting the support beam. The support part includes a first part fixed to the fixing part, and a second part formed only of a part not fixed to the fixing part. A length in the first direction of the second part is longer than a length in the first direction of the first part.
Public/Granted literature
- US20220034935A1 Inertial Sensor And Inertial Measurement Unit Public/Granted day:2022-02-03
Information query
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