Invention Grant
- Patent Title: Systems and methods for manufacturing nano-electro-mechanical-system probes
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Application No.: US17445448Application Date: 2021-08-19
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Publication No.: US11573247B2Publication Date: 2023-02-07
- Inventor: Kwame Amponsah
- Applicant: Xallent INC.
- Applicant Address: US NY Ithaca
- Assignee: Xallent INC.
- Current Assignee: Xallent INC.
- Current Assignee Address: US NY Ithaca
- Agency: Bond, Schoeneck & King, PLLC
- Main IPC: G01Q70/06
- IPC: G01Q70/06 ; G01Q60/30 ; G01Q70/10 ; G01Q70/14 ; B41J2/165

Abstract:
Systems and methods for manufacturing multiple integrated tip probes for scanning probe microscopy. According to an embodiment is a microscope probe configured to analyze a sample, the microscope probe including: a movable probe tip including a terminal probe end; a first actuator configured to displace the movable probe tip along a first axis; and a detection component configured to detect motion of the movable probe tip in response to an applied signal; where the moveable probe tip comprises a metal layer affixed to a supporting layer, at least a portion of the metal layer at the terminal probe end extending past the supporting layer.
Public/Granted literature
- US20210389346A1 SYSTEMS AND METHODS FOR MANUFACTURING NANO-ELECTRO-MECHANICAL-SYSTEM PROBES Public/Granted day:2021-12-16
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