Invention Grant
- Patent Title: Multi-input multi-zone thermal control for device testing
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Application No.: US17531463Application Date: 2021-11-19
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Publication No.: US11573262B2Publication Date: 2023-02-07
- Inventor: Karthik Ranganathan , Gregory Cruzan , Paul Ferrari , Samer Kabbani , Martin Fischer
- Applicant: Advantest Test Solutions, Inc.
- Applicant Address: US CA San Jose
- Assignee: Advantest Test Solutions, Inc.
- Current Assignee: Advantest Test Solutions, Inc.
- Current Assignee Address: US CA San Jose
- Main IPC: G01R31/28
- IPC: G01R31/28 ; G05B15/02

Abstract:
Disposing a DUT between a cold plate and an active thermal interposer device of the thermal management head. The DUT includes a plurality of modules and the active thermal interposer device includes a plurality of zones, each zone of the plurality of zones corresponding to a respective module of the plurality of modules and operable to be selectively heated. Receiving a respective set of inputs corresponding to each zone of the plurality of zones. Performing thermal management of the plurality of modules of the DUT by separately controlling temperature of each zone of the plurality zones by controlling a supply of coolant to a cold plate, and individually controlling heating of each zone of the plurality zones.
Public/Granted literature
- US20220206061A1 MULTI-INPUT MULTI-ZONE THERMAL CONTROL FOR DEVICE TESTING Public/Granted day:2022-06-30
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