Methods and systems for using a MEMS mirror for steering a LiDAR beam and for minimizing statically emitted light from a LiDAR system are disclosed. A LiDAR system includes a light source that emits a light beam directed at a MEMS device. The MEMS device includes a manipulable mirror that reflects the emitted light beam in a scanning pattern. The MEMS device also includes a substrate positioned adjacent to and at least partially surrounding the mirror. An attenuation layer is disposed on a top surface of the substrate and is configured to attenuate light reflected by the substrate.