Invention Grant
- Patent Title: Imprint apparatus, imprinting method, and method of manufacturing article
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Application No.: US16101952Application Date: 2018-08-13
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Publication No.: US11573487B2Publication Date: 2023-02-07
- Inventor: Nobuto Kawahara , Yutaka Mita
- Applicant: CANON KABUSHIKI KAISHA
- Applicant Address: JP Tokyo
- Assignee: CANON KABUSHIKI KAISHA
- Current Assignee: CANON KABUSHIKI KAISHA
- Current Assignee Address: JP Tokyo
- Agency: Canon U.S.A., Inc. I.P. Division
- Priority: JPJP2017-158784 20170821
- Main IPC: G03F7/00
- IPC: G03F7/00 ; H01L21/67 ; H01L21/68 ; B29C59/02 ; B29C33/42

Abstract:
An imprint apparatus that molds an imprint material on a substrate with a mold, the imprint apparatus including a applying device that includes a discharge surface in which a discharge opening is formed, the applying device applying the imprint material to the substrate through the discharge opening, and a measuring device that measures the position of the discharge opening by having the measuring device measure a position of an uneven structure formed in a protruded shape or a recessed shape with respect to a direction perpendicular to the discharge surface.
Public/Granted literature
- US20190057881A1 IMPRINT APPARATUS, IMPRINTING METHOD, AND METHOD OF MANUFACTURING ARTICLE Public/Granted day:2019-02-21
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