Invention Grant
- Patent Title: Negative tone photosensitive composition for EUV light, pattern forming method, and method for manufacturing electronic device
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Application No.: US17036576Application Date: 2020-09-29
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Publication No.: US11573491B2Publication Date: 2023-02-07
- Inventor: Wataru Nihashi , Michihiro Shirakawa , Michihiro Ogawa
- Applicant: FUJIFILM Corporation
- Applicant Address: JP Tokyo
- Assignee: FUJIFILM Corporation
- Current Assignee: FUJIFILM Corporation
- Current Assignee Address: JP Tokyo
- Agency: Sughrue Mion, PLLC
- Priority: JPJP2018-069071 20180330
- Main IPC: G03F7/038
- IPC: G03F7/038 ; G03F7/004 ; G03F7/20 ; G03F7/32

Abstract:
The present invention provides a negative tone photosensitive composition for EUV light, capable of forming a pattern, in which occurrence of missing defects is suppressed and pattern collapse is suppressed. The present invention also provides a pattern forming method and a method for manufacturing an electronic device. The negative tone photosensitive composition for EUV light of an embodiment of the present invention includes a resin A having a repeating unit having an acid-decomposable group with a polar group being protected with a protective group that is eliminated by the action of an acid, and a photoacid generator, in which a ClogP value of the resin after elimination of the protective group from the resin A is 1.4 or less, a value x calculated by Expression (1) is 1.2 or more, and the value x calculated by Expression (1) and a value y calculated by Expression (2) satisfy a relationship of Expression (3).
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Information query
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