Invention Grant
- Patent Title: Fast high power pulsed light source system for high speed metrology imaging
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Application No.: US17007775Application Date: 2020-08-31
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Publication No.: US11573498B2Publication Date: 2023-02-07
- Inventor: Paul Gerard Gladnick , Bjorn Erik Bertil Jansson
- Applicant: Mitutoyo Corporation
- Applicant Address: JP Kanagawa-ken
- Assignee: Mitutoyo Corporation
- Current Assignee: Mitutoyo Corporation
- Current Assignee Address: JP Kanagawa-ken
- Agency: Seed IP Law Group LLP
- Main IPC: H05B45/32
- IPC: H05B45/32 ; G03F7/00 ; G03F7/20

Abstract:
A high-power fast-pulse driver and illumination system for high speed metrology imaging is provided, which includes an illumination source and a driver circuit configured to overdrive the illumination source using high currents and/or high current densities. The high currents are currents higher than manufacturer-recommended currents used to drive the illumination source and the high current densities are current densities higher than manufacturer-recommended current densities used to drive the illumination source. The illumination source is operated using a lifetime preserving technique selected from a first technique of operating the illumination source at low duty cycles of 2% or less or a second technique of operating the illumination source in a burst mode at higher duty cycles for short intervals. The driver and illumination system may be incorporated in a variable focus lens (VFL) system, to define multiple exposure increments for acquiring one or more images focused at one or more focus planes.
Public/Granted literature
- US20210063897A1 FAST HIGH POWER PULSED LIGHT SOURCE SYSTEM FOR HIGH SPEED METROLOGY IMAGING Public/Granted day:2021-03-04
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