Invention Grant
- Patent Title: Beam trajectory via combination of image shift and hardware alpha tilt
-
Application No.: US17210223Application Date: 2021-03-23
-
Publication No.: US11574794B2Publication Date: 2023-02-07
- Inventor: Ond{hacek over (r)}ej L. Shán{hacek over (e)}l , Trond Karsten Varslot , Ond{hacek over (r)}ej R. Ba{hacek over (c)}o , Martin Schneider
- Applicant: FEI Company
- Applicant Address: US OR Hillsboro
- Assignee: FEI Company
- Current Assignee: FEI Company
- Current Assignee Address: US OR Hillsboro
- Agency: Klarquist Sparkman, LLP
- Main IPC: H01J37/20
- IPC: H01J37/20 ; H01J37/22

Abstract:
Methods include holding a sample with a movement stage configured to rotate the sample about a rotation axis, directing an imaging beam to a first sample location with the sample at a first rotational position about the rotation axis and detecting a first transmitted imaging beam image, rotating the sample using the movement stage about the rotation axis to a second rotational position, and directing the imaging beam to a second sample location by deflecting the imaging beam in relation to an optical axis of the imaging beam and detecting a second transmitted imaging beam image, wherein the second sample location is spaced apart from the first sample location at least at least in relation to the optical axis. Related systems and apparatus are also disclosed.
Public/Granted literature
- US20220310354A1 BEAM TRAJECTORY VIA COMBINATION OF IMAGE SHIFT AND HARDWARE ALPHA TILT Public/Granted day:2022-09-29
Information query