Invention Grant
- Patent Title: Substrate transport apparatus
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Application No.: US16354954Application Date: 2019-03-15
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Publication No.: US11574830B2Publication Date: 2023-02-07
- Inventor: Christopher A. Bussiere , Blake R Tashjian
- Applicant: Brooks Automation, Inc.
- Applicant Address: US MA Chelmsford
- Assignee: Brooks Automation, Inc.
- Current Assignee: Brooks Automation, Inc.
- Current Assignee Address: US MA Chelmsford
- Agency: Perman & Green, LLP
- Agent Colin C. Durham
- Main IPC: B25J9/16
- IPC: B25J9/16 ; H01L21/677 ; B25J9/04 ; B25J9/10 ; H01L21/67

Abstract:
A substrate transport apparatus including, a torsional motion driver member having an exterior perimeter circumscribing an axis of rotation of the torsional motion driver member, and a torsional motion follower member including a body portion and a bearing collar rotatably coupled to the body portion, the torsional motion follower member being coupled to the torsional motion driver member with a dimensionally substantially invariant interface, wherein the bearing collar is decoupled from the exterior perimeter of the torsional motion driver member so that the exterior perimeter, as a whole, is free of the bearing collar.
Public/Granted literature
- US20190287833A1 SUBSTRATE TRANSPORT APPARATUS Public/Granted day:2019-09-19
Information query
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