Invention Grant
- Patent Title: Die attach systems including a verification substrate
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Application No.: US16561224Application Date: 2019-09-05
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Publication No.: US11574832B2Publication Date: 2023-02-07
- Inventor: Alain De Bock , René Bouman
- Applicant: Assembléon B.V.
- Applicant Address: NL Eindhoven
- Assignee: Assembléon B.V.
- Current Assignee: Assembléon B.V.
- Current Assignee Address: NL Eindhoven
- Agent Christopher M. Spletzer, Sr.
- Main IPC: H01L21/68
- IPC: H01L21/68 ; H01L23/00 ; H01L23/544 ; H01L21/67

Abstract:
A die attach system is provided. The die attach system includes a verification substrate configured to receive a plurality of die, the verification substrate including a plurality of substrate reference markers. The die attach system also includes an imaging system for determining an alignment of the plurality of die with the verification substrate by imaging each of the plurality of die with respective ones of the plurality of substrate reference markers.
Public/Granted literature
- US20200075381A1 DIE ATTACH SYSTEMS, AND METHODS FOR INTEGRATED ACCURACY VERIFICATION AND CALIBRATION USING SUCH SYSTEMS Public/Granted day:2020-03-05
Information query
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