Invention Grant
- Patent Title: Electrostatic chuck
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Application No.: US17172056Application Date: 2021-02-09
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Publication No.: US11574833B2Publication Date: 2023-02-07
- Inventor: Juhee Lee , Cheollae Roh , Soo Beom Jo , Myungsoo Huh , Voronov Alexander , Jiwon Yeon , Haeyoung Yoo , Yongmun Chang
- Applicant: Samsung Display Co., Ltd.
- Applicant Address: KR Yongin-si
- Assignee: Samsung Display Co., Ltd.
- Current Assignee: Samsung Display Co., Ltd.
- Current Assignee Address: KR Yongin-si
- Agency: H.C. Park & Associates, PLC
- Priority: KR10-2020-0059262 20200518
- Main IPC: H02N13/00
- IPC: H02N13/00 ; H01L21/683 ; B23Q3/15
Abstract:
An electrostatic chuck fixes a substrate and includes a first area and a second area adjacent to the first area. The electrostatic chuck includes a first electrode portion disposed in the first area and a second electrode portion disposed in the second area. The first electrode portion has a first width, and the second electrode portion has a second width smaller than the first width.
Public/Granted literature
- US20210358791A1 ELECTROSTATIC CHUCK Public/Granted day:2021-11-18
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