Invention Grant
- Patent Title: Microelectronic devices including conductive structures, and related methods
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Application No.: US16990518Application Date: 2020-08-11
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Publication No.: US11574870B2Publication Date: 2023-02-07
- Inventor: John D. Hopkins , Jordan D. Greenlee , Marko Milojevic
- Applicant: Micron Technology, Inc.
- Applicant Address: US ID Boise
- Assignee: Micron Technology, Inc.
- Current Assignee: Micron Technology, Inc.
- Current Assignee Address: US ID Boise
- Agency: TraskBritt
- Main IPC: H01L23/532
- IPC: H01L23/532 ; H01L23/522 ; H01L27/146 ; H01L27/11556 ; H01L27/11524 ; H01L45/00 ; H01L21/762 ; H04N21/422 ; H04N21/21 ; H01L27/11521

Abstract:
A microelectronic device comprises pillar structures extending vertically through an isolation material, conductive lines electrically coupled to the pillar structures, contact structures between the pillar structures and the conductive lines, and interconnect structures between the conductive lines and the contact structures. The conductive lines comprise one or more of titanium, ruthenium, aluminum, and molybdenum. The interconnect structures comprise a material composition that is different than one or more of a material composition of the contact structures and a material composition of the conductive lines. Related memory devices, electronic systems, and methods are also described.
Information query
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