Invention Grant
- Patent Title: Semiconductor memory device, electronic system including the same, and method for fabricating the same
-
Application No.: US17389841Application Date: 2021-07-30
-
Publication No.: US11574883B2Publication Date: 2023-02-07
- Inventor: Jae Ho Ahn , Ji Won Kim , Sung-Min Hwang , Joon-Sung Lim , Suk Kang Sung
- Applicant: SAMSUNG ELECTRONICS CO., LTD.
- Applicant Address: KR Suwon-si
- Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee Address: KR Suwon-si
- Agency: Lee IP Law, P.C.
- Priority: KR10-2020-0137563 20201022
- Main IPC: H01L25/065
- IPC: H01L25/065 ; H01L23/535 ; H01L23/00 ; H01L25/18 ; H01L21/768 ; H01L25/00

Abstract:
A semiconductor memory device includes a first substrate including opposite first and second surfaces, a mold structure including gate electrodes stacked on the first surface of the first substrate, a channel structure through the mold structure, a first contact via penetrating the first substrate, a second substrate including opposite third and fourth surfaces, a circuit element on the third surface of the second substrate, a first through-via through the mold structure connecting the first contact via and the circuit element, the first through-via including a first conductive pattern, and a first spacer separating the first conductive pattern from the mold structure, and a second through-via through the mold structure and spaced apart from the first through-via, the second through-via including a second conductive pattern, and a second spacer separating the second conductive pattern from the first substrate and the mold structure.
Public/Granted literature
- US20220130782A1 SEMICONDUCTOR MEMORY DEVICE, ELECTRONIC SYSTEM INCLUDING THE SAME, AND METHOD FOR FABRICATING THE SAME Public/Granted day:2022-04-28
Information query
IPC分类: