- Patent Title: Method for fabricating semiconductor device with protruding contact
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Application No.: US17544663Application Date: 2021-12-07
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Publication No.: US11574911B2Publication Date: 2023-02-07
- Inventor: Chiang-Lin Shih , Chih-Hung Chen , Szu-Yao Chang
- Applicant: NANYA TECHNOLOGY CORPORATION
- Applicant Address: TW New Taipei
- Assignee: NANYA TECHNOLOGY CORPORATION
- Current Assignee: NANYA TECHNOLOGY CORPORATION
- Current Assignee Address: TW New Taipei
- Agent Xuan Zhang
- Main IPC: H01L27/108
- IPC: H01L27/108

Abstract:
The present application discloses a method for fabricating a semiconductor device with a protruding contact. The method includes providing a substrate; forming a bit line structure on the substrate; forming a capacitor contact structure next to the bit line structure; recessing a top surface of the bit line structure; and forming a landing pad layer covering a portion of a top surface of the capacitor contact structure and an upper portion of a sidewall of the capacitor contact structure.
Public/Granted literature
- US20220122982A1 METHOD FOR FABRICATING SEMICONDUCTOR DEVICE WITH PROTRUDING CONTACT Public/Granted day:2022-04-21
Information query
IPC分类: