Invention Grant
- Patent Title: Semiconductor device including insulating patterns and method for forming the same
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Application No.: US17328228Application Date: 2021-05-24
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Publication No.: US11574915B2Publication Date: 2023-02-07
- Inventor: Wooyoung Choi , Woonghwi Bae , Jinwoo Bae , Chaelin Yoon , Sunghee Han , Sunwoo Heo , Deoksung Hwang
- Applicant: Samsung Electronics Co., Ltd.
- Applicant Address: KR Suwon-si
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Suwon-si
- Agency: Muir Patent Law, PLLC
- Priority: KR10-2020-0169242 20201207
- Main IPC: H01L27/108
- IPC: H01L27/108

Abstract:
A semiconductor device includes first bit lines disposed on a substrate. Buried contacts disposed among first bit lines and connected to the substrate are provided. Landing pads are disposed on the buried contacts. Second bit lines are disposed on a peripheral area of the substrate. Upper surfaces of the second bit lines and the landing pads are coplanar with each other. First insulating patterns are disposed among the second bit lines. Second insulating patterns are disposed among the landing pads. Cell capacitors connected to the landing pads are disposed. The first insulating patterns include an insulating layer different from at least one insulating layer of the second insulating patterns.
Public/Granted literature
- US20220181329A1 SEMICONDUCTOR DEVICE INCLUDING INSULATING PATTERNS AND METHOD FOR FORMING THE SAME Public/Granted day:2022-06-09
Information query
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