Invention Grant
- Patent Title: Vertical field-effect transistor late gate recess process with improved inter-layer dielectric protection
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Application No.: US17135313Application Date: 2020-12-28
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Publication No.: US11575022B2Publication Date: 2023-02-07
- Inventor: Wenyu Xu , Ruilong Xie , Pietro Montanini , Hemanth Jagannathan
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Fleit Intellectual Property Law
- Agent Jose Gutman
- Main IPC: H01L29/78
- IPC: H01L29/78 ; H01L29/66 ; H01L21/02 ; H01L21/28 ; H01L21/285 ; H01L21/311 ; H01L21/8238 ; H01L27/092 ; H01L29/45 ; H01L29/49

Abstract:
A semiconductor device structure and a method for fabricating the semiconductor device structure are disclosed. The method includes receiving a substrate stack including at least one semiconductor fin, the substrate stack including: a bottom source/drain epi region directly below the semiconductor fin; a vertical gate structure directly above the bottom source/drain epi region and in contact with the semiconductor fin; a first inter-layer dielectric in contact with a sidewall of the vertical gate structure; and a second interlayer-layer dielectric directly above and contacting a top surface of the first inter-layer dielectric. The method further including: etching a top region of the semiconductor fin and the gate structure thereby creating a recess directly above the top region of the semiconductor fin and the vertical gate structure; and forming in the recess a top source/drain epi region directly above, and contacting, a top surface of the semiconductor fin.
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