Invention Grant
- Patent Title: Tuning of emission properties of quantum emission devices using strain-tuned piezoelectric template layers
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Application No.: US17162909Application Date: 2021-01-29
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Publication No.: US11575065B2Publication Date: 2023-02-07
- Inventor: Abhijeet Laxman Sangle
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Patterson + Sheridan, LLP
- Main IPC: H01L33/06
- IPC: H01L33/06 ; H01L33/32 ; H01L33/40 ; H01L33/00 ; G06N10/00

Abstract:
A quantum device includes a substrate including a first material and including an upper surface thereof, a first layer comprising a compound of the first material disposed on the upper surface of the substrate, a second layer, comprising a metal oxide, disposed on the first layer, a third layer, comprising a noble metal, disposed on the second layer, a fourth layer, comprising a metal oxide, disposed on the third layer, a fifth layer, comprising a piezoelectric material, disposed on the fourth layer, a sixth layer, comprising a noble metal, disposed on the fifth layer, a seventh layer, comprising a material capable of quantum emission, disposed on the sixth layer, and an eighth layer, comprising a noble metal, disposed on the seventh layer, and at least one of the eighth layer and the seventh layer are sized to enable quantum emission from the seventh layer.
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Information query
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