Invention Grant
- Patent Title: Electronic device manufacturing system
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Application No.: US16779127Application Date: 2020-01-31
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Publication No.: US11576264B2Publication Date: 2023-02-07
- Inventor: Michael Robert Rice , Jeffrey C. Hudgens
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Lowenstein Sandler LLP
- Main IPC: H05K3/00
- IPC: H05K3/00 ; H01L21/67

Abstract:
An electronic device manufacturing system includes a mainframe that includes a first transfer chamber and facets defining first side walls of the first transfer chamber. The facets include a first facet that has a first number of substrate access ports, a second facet that has a second number of substrate access ports, and a third facet that has the second number of substrate access ports. The second number of substrate access ports is different than the first number of substrate access ports.
Public/Granted literature
- US20200170117A1 ELECTRONIC DEVICE MANUFACTURING SYSTEM Public/Granted day:2020-05-28
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