Position adjustment device and ultraprecision machine tool
Abstract:
A position adjustment device for adjusting the height of an object to be supported includes: a fixed portion; a movable portion provided to be movable in the height direction relative to the fixed portion and supporting the object to be supported; an expanding and contracting portion coupled to the fixed portion and the movable portion and configured to expand and contract in the height direction; an adjustment mechanism configured to adjust the position of the movable portion in the height direction relative to the fixed portion; and a metal member fixed to the fixed portion and the movable portion.
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