Invention Grant
- Patent Title: Hydrogenated amorphous silicon detector
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Application No.: US17297441Application Date: 2019-11-29
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Publication No.: US11579317B2Publication Date: 2023-02-14
- Inventor: Mauro Menichelli
- Applicant: ISTITUTO NAZIONALE DI FISICA NUCLEARE
- Applicant Address: IT Frascati
- Assignee: ISTITUTO NAZIONALE DI FISICA NUCLEARE
- Current Assignee: ISTITUTO NAZIONALE DI FISICA NUCLEARE
- Current Assignee Address: IT Frascati
- Agency: Greer, Burns & Crain, Ltd.
- Agent Gregory P. Einhorn
- Priority: IT102018000010735 20181130
- International Application: PCT/IB2019/060336 WO 20191129
- International Announcement: WO2020/110088 WO 20200604
- Main IPC: G01T1/24
- IPC: G01T1/24 ; H01L31/0392
Abstract:
The invention refers to a detector based on 3D geometry made from a hydrogenated amorphous silicon substrate. This detector finds application in the detection of ionizing radiation.
Public/Granted literature
- US20220113436A1 HYDROGENATED AMORPHOUS SILICON DETECTOR Public/Granted day:2022-04-14
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