Invention Grant
- Patent Title: Substrate treating apparatus
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Application No.: US17016442Application Date: 2020-09-10
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Publication No.: US11581208B2Publication Date: 2023-02-14
- Inventor: Noriyuki Kikumoto , Yuzo Uchida , Hiroyuki Kawahara
- Applicant: SCREEN Holdings Co., Ltd.
- Applicant Address: JP Kyoto
- Assignee: SCREEN Holdings Co., Ltd.
- Current Assignee: SCREEN Holdings Co., Ltd.
- Current Assignee Address: JP Kyoto
- Agency: Ostrolenk Faber LLP
- Priority: JPJP2019-167040 20190913
- Main IPC: H01L21/67
- IPC: H01L21/67 ; H01L21/673 ; B08B3/04 ; H01L21/687 ; H01L21/677

Abstract:
Disclosed is a substrate treating apparatus that performs a cleaning treatment on substrates. A treating block includes a plurality of treating units in an upper and lower stages, respectively. The treating block includes a front face cleaning unit and a back face cleaning unit, each being at least one in number, in the upper stage. The treating block includes at least one tower unit including the front face cleaning unit and the back face cleaning unit, each being at least one in number, in the lower stage. Moreover, a transportation block is provided that includes a center robot in each of the upper and lower stages.
Public/Granted literature
- US20210082720A1 SUBSTRATE TREATING APPARATUS Public/Granted day:2021-03-18
Information query
IPC分类: