Invention Grant
- Patent Title: Environmental control material holder
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Application No.: US17091642Application Date: 2020-11-06
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Publication No.: US11581209B2Publication Date: 2023-02-14
- Inventor: Jason T. Steffens , Andrew Harris , Michael C. Zabka , B. Jorden Lundgren , Bryant L. Lymburn
- Applicant: ENTEGRIS, INC.
- Applicant Address: US MA Billerica
- Assignee: ENTEGRIS, INC.
- Current Assignee: ENTEGRIS, INC.
- Current Assignee Address: US MA Billerica
- Main IPC: H01L21/673
- IPC: H01L21/673

Abstract:
Environmental control material holders can retain environmental control material within wafer carriers, allowing the environmental control material to protect wafers from moisture while also securing the environmental control material. The environmental control material holders may include a baseplate and tabs defining spaces to hold environmental control material, and can be configured to engage a handle of a wafer cassette. The environmental control material holders may retain one or more environmental control materials. Additionally, the environmental control material holders can be configured to also retain a humidity indicator.
Public/Granted literature
- US20210143040A1 ENVIRONMENTAL CONTROL MATERIAL HOLDER Public/Granted day:2021-05-13
Information query
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