Invention Grant
- Patent Title: Semiconductor structure and forming method thereof
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Application No.: US17599413Application Date: 2021-04-12
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Publication No.: US11581219B2Publication Date: 2023-02-14
- Inventor: Chih-Wei Chang
- Applicant: CHANGXIN MEMORY TECHNOLOGIES, INC.
- Applicant Address: CN Hefei
- Assignee: CHANGXIN MEMORY TECHNOLOGIES, INC.
- Current Assignee: CHANGXIN MEMORY TECHNOLOGIES, INC.
- Current Assignee Address: CN Hefei
- Agency: Cooper Legal Group, LLC
- Priority: CN202010299490.5 20200416
- International Application: PCT/CN2021/086620 WO 20210412
- International Announcement: WO2021/208855 WO 20211021
- Main IPC: H01L23/48
- IPC: H01L23/48 ; H01L21/768 ; H01L21/306

Abstract:
The present disclosure relates to the field of semiconductor packaging processes, and provides a semiconductor structure and a forming method thereof. The forming method includes: providing a semiconductor substrate, where a surface of the semiconductor substrate is provided with an exposed conductive structure; forming a passivation layer on the surface of the semiconductor substrate and a surface of the exposed conductive structure; etching the passivation layer to form a recess, where a bottom of the recess exposes one end of the conductive structure; forming an adhesion layer on a surface of the recess; and etching to form a hole in the bottom of the recess.
Public/Granted literature
- US20220262676A1 SEMICONDUCTOR STRUCTURE AND FORMING METHOD THEREOF Public/Granted day:2022-08-18
Information query
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