Invention Grant
- Patent Title: Semiconductor device structure with manganese-containing interconnect structure and method for forming the same
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Application No.: US17148041Application Date: 2021-01-13
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Publication No.: US11581258B2Publication Date: 2023-02-14
- Inventor: Tse-Yao Huang
- Applicant: NANYA TECHNOLOGY CORPORATION
- Applicant Address: TW New Taipei
- Assignee: NANYA TECHNOLOGY CORPORATION
- Current Assignee: NANYA TECHNOLOGY CORPORATION
- Current Assignee Address: TW New Taipei
- Agency: Muncy, Geissler, Olds & Lowe, P.C.
- Main IPC: H01L23/532
- IPC: H01L23/532 ; H01L23/528 ; H01L21/768

Abstract:
The present disclosure provides a semiconductor device structure with a manganese-containing interconnect structure and a method for forming the semiconductor device structure. The semiconductor device structure includes a first interconnect structure disposed in a semiconductor substrate, a dielectric layer disposed over the semiconductor substrate, and a second interconnect structure disposed in the dielectric layer and electrically connected to the first interconnect structure. The first interconnect structure includes a first conductive line, and a first manganese-containing layer disposed over the first conductive line. The second interconnect structure includes a second conductive line, and a second manganese-containing layer disposed between the second conductive line and the dielectric layer.
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Information query
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