Invention Grant
- Patent Title: Stacked acoustic wave resonator package with laser-drilled VIAS
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Application No.: US17034810Application Date: 2020-09-28
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Publication No.: US11581870B2Publication Date: 2023-02-14
- Inventor: Atsushi Takano , Mitsuhiro Furukawa , Takeshi Furusawa
- Applicant: Skyworks Solutions, Inc.
- Applicant Address: US CA Irvine
- Assignee: Skyworks Solutions, Inc.
- Current Assignee: Skyworks Solutions, Inc.
- Current Assignee Address: US CA Irvine
- Agency: Knobbe, Martens, Olson & Bear LLP
- Main IPC: H03H9/25
- IPC: H03H9/25 ; H03H9/02 ; H03H9/64 ; H03H3/08 ; H03H9/145

Abstract:
A packaged acoustic wave component is disclosed. The packaged acoustic wave component can include a first acoustic wave resonator that includes a first interdigital transducer electrode that is positioned over a first piezoelectric layer. The packaged acoustic wave component can also include a second acoustic wave resonator including a second interdigital transducer electrode positioned over a second piezoelectric layer. The second piezoelectric layer is bonded to the first piezoelectric layer. The packaged acoustic wave component can further include a stopper structure that is positioned over the first piezoelectric layer. The first stopper structure is positioned above a via and extends through the first piezoelectric layer. The stopper structure is in electrical communication with the first interdigital transducer electrode and includes a material which reflects at least fifty percent of light having a wavelength of 355 nanometers.
Public/Granted literature
- US20210099157A1 STACKED ACOUSTIC WAVE RESONATOR PACKAGE WITH LASER-DRILLED VIAS Public/Granted day:2021-04-01
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