Invention Grant
- Patent Title: Molding apparatus, molding method, and manufacturing method of article
-
Application No.: US16687390Application Date: 2019-11-18
-
Publication No.: US11584048B2Publication Date: 2023-02-21
- Inventor: Masaki Ogasawara
- Applicant: CANON KABUSHIKI KAISHA
- Applicant Address: JP Tokyo
- Assignee: CANON KABUSHIKI KAISHA
- Current Assignee: CANON KABUSHIKI KAISHA
- Current Assignee Address: JP Tokyo
- Agency: Canon U.S.A., Inc., IP Division
- Priority: JPJP2018-224136 20181129
- Main IPC: B29C43/56
- IPC: B29C43/56 ; B29C43/58 ; B29C43/50 ; B29C43/32

Abstract:
An apparatus according to the present exemplary embodiment is an apparatus that forms a composition on a substrate using a mold. The apparatus includes a gas supply unit that supplies gas to a periphery of a space sandwiched between the mold and the substrate, a deforming mechanism that deforms the mold, and a control unit that, in a state in which the gas supply unit increases a density of the gas in the periphery of the space sandwiched between the mold and the substrate, after the deforming mechanism deforms the mold in a concave shape with respect to the substrate and releases the mold from the deformation, brings the mold into contact with the composition on the substrate.
Public/Granted literature
- US20200171716A1 MOLDING APPARATUS, MOLDING METHOD, AND MANUFACTURING METHOD OF ARTICLE Public/Granted day:2020-06-04
Information query