Molding apparatus, molding method, and manufacturing method of article
Abstract:
An apparatus according to the present exemplary embodiment is an apparatus that forms a composition on a substrate using a mold. The apparatus includes a gas supply unit that supplies gas to a periphery of a space sandwiched between the mold and the substrate, a deforming mechanism that deforms the mold, and a control unit that, in a state in which the gas supply unit increases a density of the gas in the periphery of the space sandwiched between the mold and the substrate, after the deforming mechanism deforms the mold in a concave shape with respect to the substrate and releases the mold from the deformation, brings the mold into contact with the composition on the substrate.
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