Invention Grant
- Patent Title: Seal for a flow restrictor
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Application No.: US16985635Application Date: 2020-08-05
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Publication No.: US11585444B2Publication Date: 2023-02-21
- Inventor: Matthew Eric Kovacic , Zachariah Ezekiel McIntyre , Sean Joseph Penley , Christopher Bryant Davis
- Applicant: Ichor Systems, Inc.
- Applicant Address: US CA Fremont
- Assignee: Ichor Systems, Inc.
- Current Assignee: Ichor Systems, Inc.
- Current Assignee Address: US CA Fremont
- Agency: The Belles Group, P.C.
- Main IPC: F16K1/52
- IPC: F16K1/52 ; F15D1/02 ; H01L21/67

Abstract:
Apparatuses for controlling gas flow are important components for delivering process gases for semiconductor fabrication. These apparatuses for controlling gas flow frequently rely on effectively sealed flow restrictors which can eliminate leakage of process gas around the flow restrictors. In one embodiment, a seal for a flow restrictor is disclosed, the seal comprising a plastic cylinder which is shrink fit onto a sealing portion of the flow restrictor. In another embodiment, a seal for a flow restrictor is disclosed, the seal having a first sealing ring with a flow aperture, a flow restrictor installed into the flow aperture.
Public/Granted literature
- US20210041027A1 SEAL FOR A FLOW RESTRICTOR Public/Granted day:2021-02-11
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