Invention Grant
- Patent Title: Capacitive pressure sensor with reduced bimetal effect
-
Application No.: US17291810Application Date: 2020-01-30
-
Publication No.: US11585710B2Publication Date: 2023-02-21
- Inventor: Jochen Reinmuth
- Applicant: Robert Bosch GmbH
- Applicant Address: DE Stuttgart
- Assignee: Robert Bosch GmbH
- Current Assignee: Robert Bosch GmbH
- Current Assignee Address: DE Stuttgart
- Agency: Norton Rose Fulbright US LLP
- Agent Gerard Messina
- Priority: DE102019201235.3 20190131
- International Application: PCT/EP2020/052282 WO 20200130
- International Announcement: WO2020/157191 WO 20200806
- Main IPC: G01L9/00
- IPC: G01L9/00

Abstract:
A pressure sensor device for a pressure sensor, in particular a capacitive pressure sensor, having a pressure chamber bounded by a movable sensing membrane and a stationary counterelectrode of the pressure sensor device. The sensing membrane and the counterelectrode each run in the longitudinal direction and the transverse direction of the pressure sensor device. The sensing membrane is directly or indirectly spring-mounted, in particular spring-mounted in two-dimensional fashion, in the pressure chamber relative to the counterelectrode by at least one micromechanical spring element, in particular a plurality of micromechanical spring elements.
Public/Granted literature
- US20210389201A1 PRESSURE SENSOR DEVICE AND METHOD FOR PRODUCING A PRESSURE SENSOR DEVICE Public/Granted day:2021-12-16
Information query