A particle detection device includes a detection tube, a light emitter, a light receiver, and a processing unit. The detection tube is for a detection solution to pass through. The light emitter generates a detection light and emits the detection light to the detection solution. The light receiver receives the detection light scattered from the detection solution. The processing unit generates a received light intensity value according to the detection signal generated by the light receiver, and determines whether the received light intensity value is greater than a first threshold value: if greater, generating a detection result of particles; otherwise, generating a detection result of no particles. Then it provides a basis for semiconductor manufacturing companies to evaluate whether the detection solution can be used in a high-precision manufacturing processes, thereby optimizing the manufacturing process and improving the yield rate of the high-precision manufacturing process.