• Patent Title: Quantitative analysis method, quantitative analysis program, and X-ray fluorescence spectrometer
  • Application No.: US17293471
    Application Date: 2020-07-10
  • Publication No.: US11585769B2
    Publication Date: 2023-02-21
  • Inventor: Shin Tanaka
  • Applicant: Rigaku Corporation
  • Applicant Address: JP Akishima
  • Assignee: Rigaku Corporation
  • Current Assignee: Rigaku Corporation
  • Current Assignee Address: JP Akishima
  • Agency: HEA Law PLLC
  • Priority: JPJP2019-171559 20190920
  • International Application: PCT/JP2020/027088 WO 20200710
  • International Announcement: WO2021/053941 WO 20210325
  • Main IPC: G01N23/223
  • IPC: G01N23/223
Quantitative analysis method, quantitative analysis program, and X-ray fluorescence spectrometer
Abstract:
A quantitative analysis method, which is performed by an X-ray fluorescence spectrometer, includes: a step of acquiring a plurality of spectra at least having a first peak at a first energy position from a sample containing a plurality of elements under different measurement conditions; a step of designating, from among the plurality of spectra, a primary spectrum and a secondary spectrum having a second peak at a second energy position; a first fitting step of performing a fitting on the first peak included in the secondary spectrum to calculate a background intensity at the second energy position due to the first peak; and a second fitting step of performing a fitting on the first peak of the primary spectrum and performing a fitting on the second peak of the secondary spectrum under a condition that the calculated background intensity is included at the second energy position.
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