Invention Grant
- Patent Title: Lamp, light source device, exposure apparatus, and article manufacturing method
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Application No.: US17704213Application Date: 2022-03-25
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Publication No.: US11586117B2Publication Date: 2023-02-21
- Inventor: Hiroyuki Tomita , Mizuma Murakami
- Applicant: CANON KABUSHIKI KAISHA
- Applicant Address: JP Tokyo
- Assignee: CANON KABUSHIKI KAISHA
- Current Assignee: CANON KABUSHIKI KAISHA
- Current Assignee Address: JP Tokyo
- Agency: Carter, DeLuca & Farrell LLP
- Priority: JPJP2021-067246 20210412
- Main IPC: G03F7/20
- IPC: G03F7/20

Abstract:
A lamp having a fin provided in a periphery of a metal base. The fin includes a first surface close to a bright spot of a light-emitting tube and a second surface far from the bright spot on an opposite side of the first surface. A distance between a first inner edge of the first surface and a bright spot plane as a plane orthogonal to a center axis of the metal base including the bright spot is shorter than a distance between the bright spot plane and a first outer edge of the first surface. A distance between the first inner edge and the first outer edge of the first surface is not shorter than a distance between a second inner edge and a second outer edge of the second surface.
Public/Granted literature
- US20220326621A1 LAMP, LIGHT SOURCE DEVICE, EXPOSURE APPARATUS, AND ARTICLE MANUFACTURING METHOD Public/Granted day:2022-10-13
Information query
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