Invention Grant
- Patent Title: Inspection apparatus that detects defect in image and inspection method and storage medium thereof
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Application No.: US17007250Application Date: 2020-08-31
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Publication No.: US11587223B2Publication Date: 2023-02-21
- Inventor: Hideaki Okano , Yoshinori Honguh
- Applicant: KABUSHIKI KAISHA TOSHIBA
- Applicant Address: JP Tokyo
- Assignee: KABUSHIKI KAISHA TOSHIBA
- Current Assignee: KABUSHIKI KAISHA TOSHIBA
- Current Assignee Address: JP Tokyo
- Agency: Finnegan, Henderson, Farabow, Garrett & Dunner, LLP
- Priority: JPJP2020-033328 20200228
- Main IPC: G06T7/00
- IPC: G06T7/00 ; G06T7/11 ; G06V10/75

Abstract:
According to one embodiment, an inspection apparatus includes an image generation device which generates a second image corresponding to a first image and a defect detection device which detects a defect in the second image with respect to the first image. The defect detection device is configured to extract a first partial region in which an amount of change of a luminance of the first image and an amount of change of a luminance of the second image have a correlation, and correct, in the first partial region, the luminance of the first image with respect to the luminance of the second image.
Public/Granted literature
- US20210272256A1 INSPECTION APPARATUS, INSPECTION METHOD, AND STORAGE MEDIUM Public/Granted day:2021-09-02
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