Invention Grant
- Patent Title: Substrate processing apparatus
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Application No.: US16910019Application Date: 2020-06-23
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Publication No.: US11587803B2Publication Date: 2023-02-21
- Inventor: Noritake Sumi , Masanobu Sato , Masayuki Orisaka , Daiki Uehara
- Applicant: SCREEN Holdings Co., Ltd.
- Applicant Address: JP Kyoto
- Assignee: SCREEN Holdings Co., Ltd.
- Current Assignee: SCREEN Holdings Co., Ltd.
- Current Assignee Address: JP Kyoto
- Agency: JCIPRNET
- Priority: JPJP2019-121645 20190628
- Main IPC: H01L21/67
- IPC: H01L21/67 ; B08B3/08 ; B08B5/00 ; B08B7/00

Abstract:
A substrate processing apparatus processes a surface of a substrate with a processing fluid and includes a support tray in which a concave part for housing the substrate is provided on an upper surface thereof; a storage container in which a cavity is formed, wherein the support tray may be stored in a horizontal posture in the cavity; and a fluid supply part supplying the processing fluid to the cavity, wherein the storage container has a flow path which receives the processing fluid and discharges the processing fluid in a horizontal direction into the cavity from a discharge port that opens on a side wall surface of the cavity and toward the cavity, and a lower end position of the discharge port in a vertical direction is the same as or higher than a position of the upper surface of the support tray stored in the cavity.
Information query
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